Multi-zone semiconductor substrate supports

ABSTRACT

Exemplary support assemblies may include a top puck and a backing plate coupled with the top puck. The support assemblies may include a cooling plate coupled with the backing plate. The support assemblies may include a heater coupled between the cooling plate and the backing plate. The support assemblies may also include a back plate coupled with the backing plate about an exterior of the backing plate. The back plate may at least partially define a volume, and the heater and the cooling plate may be housed within the volume.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 15/597,949, filed May 17, 2017, which is hereby incorporated by reference in its entirety for all purposes.

TECHNICAL FIELD

The present technology relates to components and apparatuses for semiconductor manufacturing. More specifically, the present technology relates to substrate support assemblies and other semiconductor processing equipment.

BACKGROUND

Integrated circuits are made possible by processes which produce intricately patterned material layers on substrate surfaces. Producing patterned material on a substrate requires controlled methods for forming and removing material. The temperature at which these processes occur may directly impact the final product. Substrate temperatures are often controlled and maintained with the assembly supporting the substrate during processing. Temperature fluctuations that may occur across the surface or through the depth of the supporting assembly may create temperature zones or regions across a substrate. These regions of varying temperature may affect processes performed on or to the substrate, which may often reduce the uniformity of deposited films or etched structures along the substrate. Depending on the degree of variation along the surface of the substrate, device failure may occur due to the inconsistencies produced by the applications.

Additionally, the structures housed within a semiconductor processing chamber may be affected by the processes performed within the chamber. For example, materials deposited within the chambers may deposit on the equipment within the chamber as well as on the substrate itself. Material may also deposit on support pedestals, which may cause issues with substrate alignment and re-deposition on a substrate being processed.

Thus, there is a need for improved systems and methods that can be used to produce high quality devices and structures. These and other needs are addressed by the present technology.

SUMMARY

Exemplary support assemblies may include a top puck and a backing plate coupled with the top puck. The support assemblies may include a cooling plate coupled with the backing plate. The support assemblies may include a heater coupled between the cooling plate and the backing plate. The support assemblies may also include a back plate coupled with the backing plate about an exterior of the backing plate. The back plate may at least partially define a volume, and the heater and the cooling plate may be housed within the volume.

In some embodiments, the top puck may define a thermal break between an interior zone and an exterior zone of the top puck. The thermal break may be or include a trench defined about an interior radius of the top puck. In embodiments, the thermal break may include a first trench defined about an interior radius of the top puck at a first surface of the top puck, and a second trench defined about a second interior radius of the top puck at a second surface of the top puck opposite the first surface. At least one of the first trench and the second trench may extend discontinuously about the top puck. The cooling plate may define at least one channel within the cooling plate configured to distribute a fluid delivered from a central port in the cooling plate.

In embodiments, the heater may include a first heater coupled with the backing plate at a first location, and a second heater coupled with the backing plate at a second location radially outward from the first location. The cooling plate and the backing plate may define a gap located radially between the first heater and the second heater. In some embodiments, the second heater may extend to a radial edge of a top surface of the cooling plate. The first heater and the second heater may be configured to operate independently of one another. The first heater and the second heater may be configured to maintain temperature uniformity across a substrate on the substrate support assembly of +/−0.5° C. The top puck may be or include aluminum. The heater may be or include a polymer heater. The top puck may define at least one recessed ledge about an exterior radius of the top puck. The substrate support assemblies may include an edge ring that may extend about the top puck along the recessed ledge. The edge ring may extend vertically above a top plane of the top puck. The edge ring may be characterized by an outer diameter equal to an outer diameter of the top puck. The top puck may define a plurality of recesses, and the edge ring may be configured to seat on ceramic pins located within the plurality of recesses. In some embodiments, the edge ring may seat on the ceramic pins without contacting the top puck.

The present technology also encompasses substrate support assemblies that may include a top puck. The substrate support assemblies may include a plurality of heaters coupled to the top puck. The heaters may include resistive heaters extending across a back surface of the top puck. The substrate support assemblies may include a cooling plate coupled with the plurality of heaters at a first surface of the cooling plate. The cooling plate may define a channel configured to distribute a temperature controlled fluid through the cooling plate. The substrate support assembly may also include an insulator coupled with a second surface of the cooling plate opposite the first surface.

In some embodiments, the top puck and the insulator may include a ceramic. The plurality of heaters may include at least four printed heaters, and at least three of the four printed resistive heaters may be characterized by an annular shape in embodiments. The top puck and the cooling plate may define a channel extending below an outer edge of the top puck, and the channel may be configured to seat an elastomeric element. In some embodiments, the substrate support assemblies may also include an edge ring positioned along the recessed ledge about an exterior of the cooling plate.

Such technology may provide numerous benefits over conventional systems and techniques. For example, the particular heating and cooling device couplings may provide improved heating and cooling performance for improved wafer process uniformity. Additionally, the various purging channels may improve removal of residual particles during fabrication operations. These and other embodiments, along with many of their advantages and features, are described in more detail in conjunction with the below description and attached figures.

BRIEF DESCRIPTION OF THE DRAWINGS

A further understanding of the nature and advantages of the disclosed technology may be realized by reference to the remaining portions of the specification and the drawings.

FIG. 1 shows a top plan view of an exemplary processing system according to embodiments of the present technology.

FIG. 2A shows a schematic cross-sectional view of an exemplary processing chamber according to embodiments of the present technology.

FIG. 2B shows a detailed view of an exemplary showerhead according to embodiments of the present technology.

FIG. 3 shows a bottom plan view of an exemplary showerhead according to embodiments of the present technology.

FIG. 4 shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology.

FIG. 5 shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology.

FIG. 6 shows a top plan view of an exemplary backing plate according to embodiments of the present technology.

FIG. 7A shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology.

FIG. 7B shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology.

FIG. 7C shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology.

FIG. 8 shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology.

FIG. 9 shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology.

Several of the figures are included as schematics. It is to be understood that the figures are for illustrative purposes, and are not to be considered of scale unless specifically stated to be of scale. Additionally, as schematics, the figures are provided to aid comprehension and may not include all aspects or information compared to realistic representations, and may include exaggerated material for illustrative purposes.

In the appended figures, similar components and/or features may have the same reference label. Further, various components of the same type may be distinguished by following the reference label by a letter that distinguishes among the similar components. If only the first reference label is used in the specification, the description is applicable to any one of the similar components having the same first reference label irrespective of the letter.

DETAILED DESCRIPTION

The present technology includes improved pedestal designs for heating and cooling distribution during semiconductor processing operations. While conventional pedestals may control the general temperature of the substrate during operations, the presently described technology allows for improved control of the temperature characteristics across the entirety of the surface and exterior of the pedestal. The technology allows for the pedestal to be controlled in multiple independent zones in a finite temperature range. In so doing, improved operations may be performed because a substrate residing on the pedestal can be maintained at a more uniform temperature profile across the entire surface. These and other benefits will be explained in detail below.

Although the remaining disclosure will routinely identify specific etching processes utilizing the disclosed technology, it will be readily understood that the systems and methods are equally applicable to deposition and cleaning processes as may occur in the described chambers. Accordingly, the technology should not be considered to be so limited as for use with etching processes alone. The disclosure will discuss one possible system and chamber that can be used with the present technology to perform certain removal operations before additional variations and adjustments to this system according to embodiments of the present technology are described.

FIG. 1 shows a top plan view of one embodiment of a processing system 100 of deposition, etching, baking, and curing chambers according to embodiments. In the figure, a pair of front opening unified pods (FOUPs) 102 supply substrates of a variety of sizes that are received by robotic arms 104 and placed into a low pressure holding area 106 before being placed into one of the substrate processing chambers 108 a-f, positioned in tandem sections 109 a-c. A second robotic arm 110 may be used to transport the substrate wafers from the holding area 106 to the substrate processing chambers 108 a-f and back. Each substrate processing chamber 108 a-f, can be outfitted to perform a number of substrate processing operations including the dry etch processes described herein in addition to cyclical layer deposition (CLD), atomic layer deposition (ALD), chemical vapor deposition (CVD), physical vapor deposition (PVD), etch, pre-clean, degas, orientation, and other substrate processes.

The substrate processing chambers 108 a-f may include one or more system components for depositing, annealing, curing and/or etching a dielectric film on the substrate wafer. In one configuration, two pairs of the processing chambers, e.g., 108 c-d and 108 e-f, may be used to deposit dielectric material on the substrate, and the third pair of processing chambers, e.g., 108 a-b, may be used to etch the deposited dielectric. In another configuration, all three pairs of chambers, e.g., 108 a-f, may be configured to etch a dielectric film on the substrate. Any one or more of the processes described may be carried out in chamber(s) separated from the fabrication system shown in different embodiments. It will be appreciated that additional configurations of deposition, etching, annealing, and curing chambers for dielectric films are contemplated by system 100.

FIG. 2A shows a cross-sectional view of an exemplary process chamber system 200 with partitioned plasma generation regions within the processing chamber. During film etching, e.g., titanium nitride, tantalum nitride, tungsten, silicon, polysilicon, silicon oxide, silicon nitride, silicon oxynitride, silicon oxycarbide, etc., a process gas may be flowed into the first plasma region 215 through a gas inlet assembly 205. A remote plasma system (RPS) 201 may optionally be included in the system, and may process a first gas which then travels through gas inlet assembly 205. The inlet assembly 205 may include two or more distinct gas supply channels where the second channel (not shown) may bypass the RPS 201, if included.

A cooling plate 203, faceplate 217, ion suppressor 223, showerhead 225, and a substrate support 265, having a substrate 255 disposed thereon, are shown and may each be included according to embodiments. The pedestal 265 may have a heat exchange channel through which a heat exchange fluid flows to control the temperature of the substrate, which may be operated to heat and/or cool the substrate or wafer during processing operations. The wafer support platter of the pedestal 265, which may comprise aluminum, ceramic, or a combination thereof, may also be resistively heated in order to achieve relatively high temperatures, such as from up to or about 100° C. to above or about 1100° C., using an embedded resistive heater element.

The faceplate 217 may be pyramidal, conical, or of another similar structure with a narrow top portion expanding to a wide bottom portion. The faceplate 217 may additionally be flat as shown and include a plurality of through-channels used to distribute process gases. Plasma generating gases and/or plasma excited species, depending on use of the RPS 201, may pass through a plurality of holes, shown in FIG. 2B, in faceplate 217 for a more uniform delivery into the first plasma region 215.

Exemplary configurations may include having the gas inlet assembly 205 open into a gas supply region 258 partitioned from the first plasma region 215 by faceplate 217 so that the gases/species flow through the holes in the faceplate 217 into the first plasma region 215. Structural and operational features may be selected to prevent significant backflow of plasma from the first plasma region 215 back into the supply region 258, gas inlet assembly 205, and fluid supply system 210. The faceplate 217, or a conductive top portion of the chamber, and showerhead 225 are shown with an insulating ring 220 located between the features, which allows an AC potential to be applied to the faceplate 217 relative to showerhead 225 and/or ion suppressor 223. The insulating ring 220 may be positioned between the faceplate 217 and the showerhead 225 and/or ion suppressor 223 enabling a capacitively coupled plasma (CCP) to be formed in the first plasma region. A baffle (not shown) may additionally be located in the first plasma region 215, or otherwise coupled with gas inlet assembly 205, to affect the flow of fluid into the region through gas inlet assembly 205.

The ion suppressor 223 may comprise a plate or other geometry that defines a plurality of apertures throughout the structure that are configured to suppress the migration of ionically-charged species out of the first plasma region 215 while allowing uncharged neutral or radical species to pass through the ion suppressor 223 into an activated gas delivery region between the suppressor and the showerhead. In embodiments, the ion suppressor 223 may comprise a perforated plate with a variety of aperture configurations. These uncharged species may include highly reactive species that are transported with less reactive carrier gas through the apertures. As noted above, the migration of ionic species through the holes may be reduced, and in some instances completely suppressed. Controlling the amount of ionic species passing through the ion suppressor 223 may advantageously provide increased control over the gas mixture brought into contact with the underlying wafer substrate, which in turn may increase control of the deposition and/or etch characteristics of the gas mixture. For example, adjustments in the ion concentration of the gas mixture can significantly alter its etch selectivity, e.g., SiNx:SiOx etch ratios, Si:SiOx etch ratios, etc. In alternative embodiments in which deposition is performed, it can also shift the balance of conformal-to-flowable style depositions for dielectric materials.

The plurality of apertures in the ion suppressor 223 may be configured to control the passage of the activated gas, i.e., the ionic, radical, and/or neutral species, through the ion suppressor 223. For example, the aspect ratio of the holes, or the hole diameter to length, and/or the geometry of the holes may be controlled so that the flow of ionically-charged species in the activated gas passing through the ion suppressor 223 is reduced. The holes in the ion suppressor 223 may include a tapered portion that faces the plasma excitation region 215, and a cylindrical portion that faces the showerhead 225. The cylindrical portion may be shaped and dimensioned to control the flow of ionic species passing to the showerhead 225. An adjustable electrical bias may also be applied to the ion suppressor 223 as an additional means to control the flow of ionic species through the suppressor.

The ion suppressor 223 may function to reduce or eliminate the amount of ionically charged species traveling from the plasma generation region to the substrate. Uncharged neutral and radical species may still pass through the openings in the ion suppressor to react with the substrate. It should be noted that the complete elimination of ionically charged species in the reaction region surrounding the substrate may not be performed in embodiments. In certain instances, ionic species are intended to reach the substrate in order to perform the etch and/or deposition process. In these instances, the ion suppressor may help to control the concentration of ionic species in the reaction region at a level that assists the process.

Showerhead 225 in combination with ion suppressor 223 may allow a plasma present in first plasma region 215 to avoid directly exciting gases in substrate processing region 233, while still allowing excited species to travel from chamber plasma region 215 into substrate processing region 233. In this way, the chamber may be configured to prevent the plasma from contacting a substrate 255 being etched. This may advantageously protect a variety of intricate structures and films patterned on the substrate, which may be damaged, dislocated, or otherwise warped if directly contacted by a generated plasma. Additionally, when plasma is allowed to contact the substrate or approach the substrate level, the rate at which oxide species etch may increase. Accordingly, if an exposed region of material is oxide, this material may be further protected by maintaining the plasma remotely from the substrate.

The processing system may further include a power supply 240 electrically coupled with the processing chamber to provide electric power to the faceplate 217, ion suppressor 223, showerhead 225, and/or pedestal 265 to generate a plasma in the first plasma region 215 or processing region 233. The power supply may be configured to deliver an adjustable amount of power to the chamber depending on the process performed. Such a configuration may allow for a tunable plasma to be used in the processes being performed. Unlike a remote plasma unit, which is often presented with on or off functionality, a tunable plasma may be configured to deliver a specific amount of power to the plasma region 215. This in turn may allow development of particular plasma characteristics such that precursors may be dissociated in specific ways to enhance the etching profiles produced by these precursors.

A plasma may be ignited either in chamber plasma region 215 above showerhead 225 or substrate processing region 233 below showerhead 225. In embodiments, the plasma formed in substrate processing region 233 may be a DC biased plasma formed with the pedestal acting as an electrode. Plasma may be present in chamber plasma region 215 to produce the radical precursors from an inflow of, for example, a fluorine-containing precursor or other precursor. An AC voltage typically in the radio frequency (RF) range may be applied between the conductive top portion of the processing chamber, such as faceplate 217, and showerhead 225 and/or ion suppressor 223 to ignite a plasma in chamber plasma region 215 during deposition. An RF power supply may generate a high RF frequency of 13.56 MHz but may also generate other frequencies alone or in combination with the 13.56 MHz frequency.

FIG. 2B shows a detailed view 253 of the features affecting the processing gas distribution through faceplate 217. As shown in FIGS. 2A and 2B, faceplate 217, cooling plate 203, and gas inlet assembly 205 intersect to define a gas supply region 258 into which process gases may be delivered from gas inlet 205. The gases may fill the gas supply region 258 and flow to first plasma region 215 through apertures 259 in faceplate 217. The apertures 259 may be configured to direct flow in a substantially unidirectional manner such that process gases may flow into processing region 233, but may be partially or fully prevented from backflow into the gas supply region 258 after traversing the faceplate 217.

The gas distribution assemblies such as showerhead 225 for use in the processing chamber section 200 may be referred to as dual channel showerheads (DCSH) and are additionally detailed in the embodiments described in FIG. 3. The dual channel showerhead may provide for etching processes that allow for separation of etchants outside of the processing region 233 to provide limited interaction with chamber components and each other prior to being delivered into the processing region.

The showerhead 225 may comprise an upper plate 214 and a lower plate 216. The plates may be coupled with one another to define a volume 218 between the plates. The coupling of the plates may be so as to provide first fluid channels 219 through the upper and lower plates, and second fluid channels 221 through the lower plate 216. The formed channels may be configured to provide fluid access from the volume 218 through the lower plate 216 via second fluid channels 221 alone, and the first fluid channels 219 may be fluidly isolated from the volume 218 between the plates and the second fluid channels 221. The volume 218 may be fluidly accessible through a side of the gas distribution assembly 225.

FIG. 3 is a bottom view of a showerhead 325 for use with a processing chamber according to embodiments. Showerhead 325 may correspond with the showerhead 225 shown in FIG. 2A. Through-holes 365, which show a view of first fluid channels 219, may have a plurality of shapes and configurations in order to control and affect the flow of precursors through the showerhead 225. Small holes 375, which show a view of second fluid channels 221, may be distributed substantially evenly over the surface of the showerhead, even amongst the through-holes 365, and may help to provide more even mixing of the precursors as they exit the showerhead than other configurations.

FIG. 4 shows a schematic partial cross-sectional view of an exemplary substrate support assembly 400 according to embodiments of the present technology. Substrate support assembly 400 may be similar to substrate support or pedestal 265 discussed previously, and may include some or all features discussed above with that structure. As illustrated, the substrate support assembly 400 includes a top puck 405, a backing plate 415, a heater 425, a cooling plate 435, and a back plate 445. Backing plate 415 may be coupled with top puck 405. Cooling plate 435 may be directly or indirectly coupled with backing plate 415, and heater 425 may be coupled between the cooling plate 435 and the backing plate 415. Back plate 445 may be coupled with backing plate 415 along a periphery or exterior section 417 of backing plate 415. Back plate 445 may define a ledge 447 in a top surface 446 of back plate 445 that extends down to an interior region 449 of back plate 445 defined in the top surface 446. Interior region 449 of back plate 445 may extend radially from a central axis of back plate 445 and may define a volume 450 from below. Back plate 445 may also define sides of the volume 450 with a raised section 451 of back plate 445 extending vertically to ledge 447.

Back plate 445 and backing plate 415 may be characterized by a similar or equivalent external diameter such that the coupled components define a substantially vertical sidewall of support assembly 400. Backing plate 415 may at least partially define volume 450 from above, so that volume 450 is a defined volume within substrate support assembly 400. Heater 425 and cooling plate 435 may be housed within volume 450 in embodiments. Raised section 451 of back plate 445 may also include trench 452 defined in top surface 446 of back plate 445. The trench 452 may be configured to seat an o-ring or elastomeric element to provide a seal between back plate 445 and backing plate 415.

Top puck 405 may define one or more thermal breaks 408, 410 within the top puck 405, which may at least partially define one or more channels with backing plate 415, which will be described in greater detail below. Top puck 405 may define any number of thermal breaks within the top puck 405, and may include at least or about 2, at least or about 3, at least or about 4, at least or about 5, at least or about 6, at least or about 7, at least or about 8, at least or about 9, at least or about 10, or more in embodiments. In some embodiments, such as illustrated in substrate support assembly 400, top puck 405 may define one or two thermal breaks. First thermal break 408 may be defined within a top surface 406 of top puck 405, and may be characterized by a depth through top puck 405.

First thermal break 408 may be defined radially about top puck 405, and may be configured to at least partially divide top puck 405 into an interior zone 412 and an exterior zone 414 in embodiments. First thermal break 408 may be or include a trench defined about top puck 405 along an interior radius of the top puck. The depth of first thermal break 408 may be greater than half the thickness of top puck 405 in embodiments, and may be greater than or about 60%, greater than or about 70%, greater than or about 80%, greater than or about 90%, or equal to or about 100% of the thickness of top puck 405. In the case in which the trench fully intersects top puck 405, interior zone 412 and exterior zone 414 may be two separate components individually coupled with backing plate 415. First thermal break 408 may be configured to thermally isolate interior zone 412 and exterior zone 414 in embodiments. Such isolation may allow interior zone 412 and exterior zone 414 to be separately heated or cooled during operation.

The thermal breaks may include multiple breaks, including a second thermal break 410, which may be defined in a bottom surface 407 of top puck 405, or in a surface opposite first surface or top surface 406. Second thermal break 410 may be defined at a second internal radius of top puck 405, which may be radially inward or radially outward of first thermal break 408. Second thermal break 410 may be characterized by a second depth through top puck 405, which may be greater than, equal to, or less than a first depth of first thermal break 408. For example, as illustrated, second thermal break 410 may be characterized by a depth less than a depth of first thermal break 408. Either or both of first thermal break 408 and second thermal break 410 may extend continuously or discontinuously about top puck 405. For example, first thermal break 408 may extend substantially continuously about top puck 405, but may have one or more connections, such as minimally thick extensions, at a bottom region across the first thermal break 408 to couple the interior zone 412 to the exterior zone 414 of top puck 405, which may allow a one-piece design of top puck 405. Second thermal break 410, however, may have sections about a radius of the trench in which the trench is not formed through top puck 405. This arrangement will be described in further detail below.

A benefit of multiple thermal breaks is that a thermal break defined from a top surface and a thermal break defined from a bottom surface may help to reduce crosstalk between the two zones, which may allow even more fine-tune temperature adjustments between the zones. Top puck 405 may be composed of any number of materials, and in embodiments, may be or include an aluminum material. Top puck 405 may be any type of aluminum, including a coated or plated aluminum. For example, top puck 405 may be a nickel or titanium coated aluminum in embodiments, which may protect top puck 405 from etching.

Heater 425 may include a resistive heater or a fluid heater in embodiments. Heater 425 may include a polymer heater bonded or coupled with a top surface 436 of cooling plate 435 and also bonded or coupled with backing plate 415. Heater 425 may include multiple heaters in embodiments, and may include a first heater 426 and a second heater 427. First heater 426 may be coupled with the backing plate 415 at a first location, and second heater 427 may be coupled with backing plate 415 at a second location. First heater 426 may be positioned at an interior region of cooling plate 435, and may be positioned within or in line with interior zone 412. Second heater 427 may be positioned at an exterior region of cooling plate 435, and may be positioned within or in line with exterior zone 414. Second heater 427 may be positioned radially outward of first thermal break 408 in embodiments. A gap 437 may be defined from above by backing plate 415 and may be defined from below by cooling plate 435. The gap 437 may be located between first heater 426 and second heater 427, and may be an annular gap located radially between the two heaters. In some embodiments, second heater 427 may extend proximate a radial edge of top surface 436 of cooling plate 435, and second heater 427 may extend to a radial edge of top surface 436 of cooling plate 435.

The first heater 426 and the second heater 427 may be operated independently of one another, and may be capable of adjusting temperatures across the top puck 405, as well as a substrate residing on the top puck 405. Each heater may have a range of operating temperatures extending above or about 25° C., and each heater may be configured to heat above or about 50° C., above or about 60° C., above or about 70° C., above or about 80° C., above or about 90° C., above or about 100° C., above or about 125° C., above or about 150° C., above or about 175° C., above or about 200° C., above or about 250° C., above or about 300° C., above or about 350° C., above or about 400° C., above or about 500° C., above or about 600° C., above or about 700° C., or higher. The heaters may also be configured to operate in any range encompassed between any two of these stated numbers, or smaller ranges encompassed within any of these ranges.

The first heater 426 and the second heater 427 may also be configured to operate within a temperature range of one another, and configured to maintain a specific temperature across the surface of the top puck 405 or a substrate residing on top puck 405. For example, first heater 426 may be configured to operate to maintain interior zone 412 at a first temperature, and second heater 427 may be configured to operate to maintain exterior zone 414 at a second temperature similar to or different from the first. Each temperature of either the heater or the zone may be any temperature stated or included above, which may allow the two heaters to operate at a difference of tens or hundreds of degrees. Additionally, the difference between the operating temperature of the two heaters, or the maintained temperature of the interior zone 412 and the exterior zone 414, may be less than 10° C. in embodiments. The temperature difference between the two heaters or maintained by the two zones may also be less than or about 5° C., less than or about 4° C., less than or about 3° C., less than or about 2° C., less than or about 1° C., less than or about 0.9° C., less than or about 0.8° C., less than or about 0.7° C., less than or about 0.6° C., less than or about 0.5° C., less than or about 0.4° C., less than or about 0.3° C., less than or about 0.2° C., less than or about 0.1° C., or less in embodiments. By allowing such minute temperature differences between the two zones, temperature fluctuations occurring due to precursor flow across a substrate, interference from other chamber components, reactions or operations occurring in one zone but not another based on a fabrication step, and other fluctuation sources may be controlled against during operation. This may allow improved uniformity across the zones and across a substrate being processed compared to conventional technology.

Cooling plate 435 may define one or more channels 438 within cooling plate 435. Channels 438 may be configured to distribute one or more temperature controlled fluids about cooling plate 435. Channel 438 may be accessed from a central port 439 at a central or interior region of cooling plate 435, which may be accessible from a stem of the substrate support assembly. A cooling fluid may be delivered up the stem and into central port 439, which may then allow the fluid to flow about channel 438. Channel 438 may be in any number of geometric patterns, such as a spiral or coil, as well as substantially concentric circles about the cooling plate 435. The pattern may extend to an exterior of cooling plate 435 before returning to an exit port, which may also be located at a central region of the cooling plate, and may provide access to additional channels or couplings within the stem of the pedestal, to allow return of the fluid to a heat exchanger or other apparatus for cooling and recirculation. As illustrated, cooling plate 435 may not fully extend to raised section 451 of back plate 445, and may maintain a gap of volume 450 between a radial edge of cooling plate 435 and raised section 451 of back plate 445. Such a gap may limit or prevent thermal communication from the cooling plate 435 and heater 425 to back plate 445, which may conduct through to top puck 405.

Top puck 405 may define one or more recessed ledges 404 about an exterior radius of the top puck 405. Recessed ledges 404 may extend or step down towards an edge of top puck 405, which may be characterized by an outer diameter similar to or equal to an outer diameter of backing plate 415 and/or back plate 445. Two recessed ledges 404 are illustrated in FIG. 4, although the top puck 405 may define any number of recessed ledges 404. Aspects of recessed ledges 404 and top puck 405 are further illustrated in FIG. 5 which shows another schematic partial cross-sectional view of exemplary substrate support assembly 400 according to embodiments of the present technology.

As illustrated in FIG. 5, substrate support assembly 400 may include a top puck 405, which may be characterized by a plurality of grooves 505, which may be formed or defined about top puck 405. Grooves 505 may provide pathways for forming a vacuum chuck with a substrate residing on top puck 405, which may limit substrate movement during operations. Top puck 405 may also define one or more recessed ledges 404 as previously discussed. As illustrated, a first recessed ledge 404 a and a second recessed ledge 404 b are defined in top puck 405, and second recessed ledge 404 b may extend to an exterior edge of top puck 405. Top puck 405 may define one or more recesses 510 within top puck 405. Recesses 510 may be cylindrical recesses, rectangular recesses, or any other geometry that extends to a depth through top puck 405. Recesses 510 may be distributed about an edge region of top puck 405, and may include one recess, two recesses, three recesses, four recesses, five recesses, six recesses, seven recesses, eight recesses, nine recesses, ten recesses, or more in embodiments.

Recesses 510 may provide locations for pins 515, which may be positioned within recesses 510 of top puck 405. The recesses 510 may be defined at any location about an exterior region of top puck 405, and in embodiments recesses 510 are defined within the recessed ledges 404 defined in top puck 405. As illustrated, recesses 510 may be defined in a first recessed ledge 404 a located below a top surface 406 of top puck 405, and above a second recessed ledge 404 b, located below first recessed ledge 404 a. The recesses 510 may be defined in multiple locations about top puck 405 in recessed ledge 404 a, and in embodiments, recessed ledge 404 a may define between about 2 and about 10 recesses 510, between about 2 and about 5 recesses 510, or between about 2 and about 4 recesses 510. In some embodiments, recessed ledge 404 a may define three recesses 510 distributed equidistantly about top puck 405. Pins 515 may be or include a ceramic pin having a first portion 516 seated within recess 510, and a second portion 517 extending above recess 510. Second portion 517 of pin 515 may define a surface on which an edge ring 520 is seated.

Edge ring 520 may be seated on a plurality of pins 515 located in recesses 510 within top puck 405. Edge ring 520 may be a similar material or a different material from top puck 405, and in embodiments, edge ring 520 may include a nickel plated aluminum or other plated aluminum, which may limit corrosion of the edge ring 520 during etching operations utilizing a halogen-containing precursor, for example. Edge ring 520 may extend about the top puck along recessed ledges 404, and may extend vertically above top puck 405 in embodiments so as to extend vertically above a top plane of the top puck 405. Edge ring 520 may be characterized by an inner edge 522, which may be beveled or chamfered in embodiments, extending towards top puck 405. Edge ring 520 may also be characterized by an outer diameter equal to or similar to an outer diameter of top puck 405, such that in some embodiments, edge ring 520 does not extend beyond an external radius of top puck 405. Edge ring 520 may be seated on pins 515, and may float above top puck 405. In some embodiments, edge ring 520 may not contact top puck 405, which may allow a continuous spacing between each surface of top puck 405, including recessed ledges 404, and edge ring 520. A purge gas may be flowed through apertures through top puck 405 extending through recessed ledges 404, which may allow continuous purging from about the edge ring 520. Edge ring 520 may allow an amount of precursor flow from external edges of the chamber to be blocked to prevent or limit additional etching, deposition, or processing of edge regions of a substrate in some embodiments.

FIG. 6 shows a top plan view of an exemplary backing plate 600 according to embodiments of the present technology. Backing plate 600 may be configured to at least partially define flow channels with a top puck of a substrate support assembly, and provide access for delivering a purge gas through the pedestal and top puck to limit or prevent deposition, etching, or particle accumulation on the substrate support assembly. Backing plate 600 may be characterized by a substantially annular shape, and may define a plurality of apertures through backing plate 600. Apertures 605 may be aligned with apertures through a top puck to provide direct paths for a vacuum chuck to be applied through the backing plate 600 and an associated top puck, such as top puck 405 previously described. Apertures 610 and apertures 615 may provide access to channels defined between the backing plate 600 and a top puck to which the backing plate is coupled, which may direct a purge gas to additional regions of the top puck.

Apertures 610 may provide access to a first recess 612 defined by a top surface 602 of backing plate 600. Backing plate 600 may define one or more apertures 610 distributed radially about backing plate 600, and as illustrated four are shown along with corresponding first recesses 612, although depending on the geometry, size, and spacing of a particular substrate support assembly, exemplary backing plates 600 may include more or less apertures 610 and first recesses 612 in embodiments. First recess 612 may be defined across an external section of backing plate 600, and may be defined radially or laterally in two opposite directions from aperture 610. The individual arms of first recess 612 may extend laterally before curving or angling away from an external edge of backing plate 600. Along each arm of first recess 612 may be an access aperture through a top puck associated with the backing plate, which may provide a flow path for a purge gas.

Apertures 615 may provide access to a second recess 616 defined by a top surface 602 of backing plate 600. Backing plate 600 may define one or more apertures 615 distributed radially about backing plate 600, and as illustrated four are shown along with corresponding second recesses 616, although depending on the geometry, size, and spacing of a particular substrate support assembly, exemplary backing plates 600 may include more or less apertures 615 and second recesses 616 in embodiments. Apertures 615 providing access to second recesses 616 may be formed in an alternating manner about backing plate 600 with apertures 610 providing access to first recesses 612 as illustrated in some embodiments. Second recess 616 may be defined radially inward towards a central region of backing plate 600 in embodiments, and may define a recursive pattern expanding to two paths 618, which may then extend to four paths 620. Along each arm of second recess 616 may be an access aperture through a top puck associated with the backing plate, which may provide a flow path for a purge gas. In this way, the combination of first recesses 612 as illustrated may provide access to a total of eight apertures defined through an associated top puck, and the combination of second recesses 616 may provide access to 16 apertures defined through an associated top puck radially inward of the eight apertures accessed from first recesses 612. Such a design may provide ample purge gas flow through the top puck, which may limit or prevent particle accumulation on a surface of the top puck, or about a substrate residing on the top puck. In other embodiments, any additional number of apertures may be formed about and through the backing plate and associated top puck.

Backing plate 600 may also define third recesses 625 extending about a radius of backing plate 600, which may align with a thermal break, such as first thermal break 408 described above. Backing plate 600 may also define fourth recesses 630, which may fully penetrate backing plate 600, unlike any other recesses discussed, which may be defined within top surface 602. Fourth recesses 630 may align with a thermal break, such as second thermal break 410 described above. Because second thermal break 410 extends upward through a bottom of top puck 405, by providing full recess through backing plate 600 with fourth recesses 630, a more consistent and pronounced thermal break may be afforded. One or both of third recesses 625 and fourth recesses 630 may also align with a gap between heaters, such as gap 437 described above. This may provide additional thermal break between an interior zone and an exterior zone of a substrate support assembly.

Turning to FIG. 7A is shown a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology. The cross-section may be through line A as illustrated in FIG. 6, for example, which may provide an illustration of the apertures 610, and first recesses 612 of backing plate 600. The substrate support assembly may be similar to or an alternate view of substrate support assembly 400 described previously, and may include a top puck 405, an edge ring 520, a backing plate 415, and a back plate 445. As illustrated, back plate 445 may define one or more channels 705 for delivering a purge gas from a central region of the substrate support assembly, such as a stem, out to an exterior of the substrate support assembly. Channel 705 may extend radially outward through back plate 445, before transitioning vertically towards backing plate 415. Aperture 610 may provide access to first recess 612, which may produce a channel defined from above by top puck 405. Within this channel, along top puck 405 may be defined one or more apertures up through top puck 405, into an edge region of top puck 405, such as under edge ring 520.

FIG. 7B shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology. The cross-section may be through line B as illustrated in FIG. 6, for example, which may provide an illustration of the apertures 615, and second recesses 616 of backing plate 600. As illustrated, back plate 445 may define one or more additional channels 705 for delivering a purge gas from a central region of the substrate support assembly, such as a stem, out to an exterior of the substrate support assembly. Channel 705 may extend radially outward through back plate 445, before transitioning vertically towards backing plate 415. Aperture 615 may provide access to second recess 616, which may produce a channel defined from above by top puck 405. Within this channel, along top puck 405 may be defined one or more apertures up through top puck 405, into one or more interior regions of top puck 405 through the recursive path of recess 616. The apertures may be defined through top puck 405 in multiple locations, such as along the radial portion of recess 616, as well as along the recursive portions 618 and 620. For example, exemplary apertures 715, 716 are illustrated in FIG. 7C, which shows a schematic partial cross-sectional view of an exemplary substrate support assembly according to embodiments of the present technology along an alternate line or cross-section. As illustrated, aperture 715 may be located along recess 616, while aperture 716 may be located within recursive region 618. It is to be understood that the exemplary aperture pattern discussed is for illustration alone, and a variety of aperture patterns enabled by the present technology, including backing plate configurations, are similarly encompassed.

FIG. 8 shows a schematic partial cross-sectional view of an exemplary substrate support assembly 800 according to embodiments of the present technology. Substrate support assembly 800 may be similar to substrate support 400 or pedestal 265 discussed previously, and may include some or all features discussed above with those structures. Substrate support assembly 800 may include a top puck 805. Coupled with top puck 805 may be a plurality of heaters 815. The heaters 815 may be resistive heaters or fluid channels through which a temperature controlled fluid is flowed. In embodiments such as those illustrated, the heaters 815 may be resistive heaters extending across a back surface of the top puck 805. A cooling plate 820 may be coupled with the plurality of heaters 815 at a top surface 822 of the cooling plate. Cooling plate 820 may also define one or more channels 825 configured to distribute a temperature controlled fluid through the cooling plate.

Insulator 830 may be coupled with a second surface 824 of cooling plate 820 opposite top surface 822. Insulator 830 may be or include a ceramic in embodiments, and top puck 805 may also be or include a ceramic in embodiments. Cooling plate 820 and a back plate 835 may be or include aluminum in embodiments, including a treated or coated aluminum as previously described. Back plate 835 may be coupled below insulator 830. Back plate 835, insulator 830, and cooling plate 820 may be coupled with one another, and in embodiments may be directly coupled together. The coupled pieces may each define at least a portion of at least one channel 840 through the structure, which may provide access for a lift pin 842. Lift pin 842 may be configured to be raised through channel 840 and through top puck 805 to lift and lower a substrate. Cooling plate 820 may define a recessed ledge 827 from top surface 822, extending to a radial edge of cooling plate 820. Recessed ledge 827 may extend past a radial edge of top puck 805.

An edge ring 845 may be positioned on recessed ledge 827 about an exterior of cooling plate 820. Edge ring 845 may include a top surface 846 extending from a body of edge ring 845 seated on recessed ledge 827. Top surface 846 may define a lip 847 that extends radially or horizontally over an exterior radius of top puck 805, and may be characterized by a beveled or chamfered edge extending towards top puck 805. In embodiments, lip 847 may not contact top puck 805, and may provide a space between the components configured to allow passage of a purge gas between the lip 847 and the top puck 805. Edge ring 845 may also include a sidewall 848 extending from a body of edge ring 845 seated on recessed ledge 827. Sidewall 848 may define an extension 849 that extends vertically about insulator 830 and back plate 835. Extension 849 may not contact insulator 830 or back plate 835, and may provide a space between the components configured to allow passage of a purge gas between the extension 849, and insulator 830 and back plate 835. Extension 849 may extend to a base thickness of back plate 835, and may extend slightly beyond or below back plate 835 in embodiments to limit or prevent particle accumulation on the stacked components.

Heaters 815 may include a plurality of heaters in various configurations across a back of top puck 805. For example, heaters 815 may include a plurality of polymer or printed heaters extending radially outward along top puck 805 to produce multiple radial zones across top puck 805. For example, a central heater in a circular pattern may be disposed or printed at a central location under top puck 805. Additional heaters having an annular shape may be disposed about the central heater, and may include any number of heaters extending outward including greater than or about 2 heaters, greater than or about 3 heaters, greater than or about 4 heaters, greater than or about 5 heaters, greater than or about 6 heaters, greater than or about 7 heaters, or more. The heaters may include adjustable resistances, which may allow the heaters to be independently controlled and operated at different temperatures. Each heater may be operated at any of the temperatures previously described, and the heaters may be maintained at temperature differentials as previously described.

Turning to FIG. 9 is shown an additional schematic partial cross-sectional view of an exemplary substrate support assembly 800 according to embodiments of the present technology. FIG. 9 illustrates a cross-sectional view with edge ring 845 removed. As illustrated, top puck 805 can be seen to include a recessed ledge 907 over which lip 847 of edge ring 845 may extend. A recessed ledge 909 may also be defined along a top surface of cooling plate 820 at a radial edge of the top puck 805. As illustrated, recessed ledge 909 may extend radially inward along cooling plate 820 and under top puck 805 less than half the distance of recessed ledge 907. In some embodiments, recessed ledge 909 may extend less than or about 40% the radial inward distance of recessed ledge 907, and may extend less than or about 30%, less than or about 20%, less than or about 10%, less than or about 5%, or less.

Recessed ledge 909 may at least partially define a channel 910 defined from below by top surface 822 of cooling plate 820. Channel 910 may extend below an outer edge of the top puck 805, such as within recessed ledge 909, and channel 910 may be configured to seat an elastomeric element or o-ring between the top puck and cooling plate. As noted above, cooling plate 820, insulator 830, and back plate 835 may be directly coupled together, which may reduce or eliminate particle distribution between the components. Top puck 805 may be coupled with the structure separately, and an elastomeric element positioned between the top puck 805 and cooling plate 820 within a channel 910 as illustrated may limit or prevent any particle distribution between the top puck and other components.

In the preceding description, for the purposes of explanation, numerous details have been set forth in order to provide an understanding of various embodiments of the present technology. It will be apparent to one skilled in the art, however, that certain embodiments may be practiced without some of these details, or with additional details.

Having disclosed several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the embodiments. Additionally, a number of well-known processes and elements have not been described in order to avoid unnecessarily obscuring the present technology. Accordingly, the above description should not be taken as limiting the scope of the technology.

Where a range of values is provided, it is understood that each intervening value, to the smallest fraction of the unit of the lower limit, unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Any narrower range between any stated values or unstated intervening values in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of those smaller ranges may independently be included or excluded in the range, and each range where either, neither, or both limits are included in the smaller ranges is also encompassed within the technology, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.

As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural references unless the context clearly dictates otherwise. Thus, for example, reference to “a layer” includes a plurality of such layers, and reference to “the precursor” includes reference to one or more precursors and equivalents thereof known to those skilled in the art, and so forth.

Also, the words “comprise(s)”, “comprising”, “contain(s)”, “containing”, “include(s)”, and “including”, when used in this specification and in the following claims, are intended to specify the presence of stated features, integers, components, or operations, but they do not preclude the presence or addition of one or more other features, integers, components, operations, acts, or groups. 

1. A substrate support assembly comprising: a top puck; a plurality of heaters coupled to the top puck, wherein the heaters comprise resistive heaters extending across a back surface of the top puck; a cooling plate coupled with the plurality of heaters at a first surface of the cooling plate, wherein the cooling plate defines a channel configured to distribute a temperature controlled fluid through the cooling plate; and an insulator coupled with a second surface of the cooling plate opposite the first surface.
 2. The substrate support assembly of claim 1, wherein the top puck and the insulator comprise a ceramic.
 3. The substrate support assembly of claim 1, wherein the cooling plate comprises aluminum.
 4. The substrate support assembly of claim 1, wherein the insulator is coupled with the cooling plate along a first surface of the insulator, the substrate support assembly further comprising: a back plate coupled with a second surface of the insulator opposite the first surface of the insulator.
 5. The substrate support assembly of claim 4, wherein the back plate comprises aluminum.
 6. The substrate support assembly of claim 4, wherein the cooling plate, the insulator, and the back plate define a lift pin channel through the substrate support assembly.
 7. The substrate support assembly of claim 1, wherein the plurality of heaters comprise at least four printed resistive heaters, and wherein at least three of the four printed resistive heaters are characterized by an annular shape.
 8. The substrate support assembly of claim 1, wherein the top puck and the cooling plate define a channel extending below an outer edge of the top puck.
 9. The substrate support assembly of claim 8, further comprising an elastomeric element seated in the channel.
 10. The substrate support assembly of claim 1, further comprising an edge ring positioned along a recessed ledge about an exterior of the cooling plate.
 11. The substrate support assembly of claim 10, wherein the edge ring comprises a sidewall extension disposed radially about the insulator and a back plate.
 12. The substrate support assembly of claim 11, wherein a gap is maintained between an inner surface of the sidewall extension of the edge ring and the insulator.
 13. The substrate support assembly of claim 11, wherein a gap is maintained between an inner surface of the sidewall extension of the edge ring and the back plate.
 14. A substrate support assembly comprising: a top puck; a plurality of heaters coupled to the top puck, wherein the heaters comprise resistive heaters extending across a back surface of the top puck; a cooling plate coupled with the plurality of heaters at a first surface of the cooling plate, wherein the cooling plate defines a channel configured to distribute a temperature controlled fluid through the cooling plate; an insulator coupled with a second surface of the cooling plate opposite the first surface, wherein the insulator is coupled with the cooling plate along a first surface of the insulator; and a back plate coupled with a second surface of the insulator opposite the first surface of the insulator.
 15. The substrate support assembly of claim 14, wherein the top puck and the insulator comprise a ceramic.
 16. The substrate support assembly of claim 14, wherein the cooling plate and the back plate comprise aluminum.
 17. The substrate support assembly of claim 14, further comprising: an edge ring positioned along a recessed ledge about an exterior of the cooling plate.
 18. The substrate support assembly of claim 17, wherein the edge ring comprises a sidewall extension disposed radially about the insulator and the back plate, and wherein a gap is maintained between an inner surface of the sidewall extension of the edge ring and the insulator.
 19. The substrate support assembly of claim 14, wherein the plurality of heaters comprise at least four printed resistive heaters, and wherein at least three of the four printed resistive heaters are characterized by an annular shape.
 20. The substrate support assembly of claim 14, wherein the top puck and the cooling plate define a channel extending below an outer edge of the top puck, and wherein the substrate support assembly further comprises: an elastomeric element seated in the channel. 